Loading...
Please wait, while we are loading the content...
Similar Documents
Characteristics of bonding structures of diamond-like carbon films deposited by radio frequency plasma-enhanced chemical vapor deposition
| Content Provider | Semantic Scholar |
|---|---|
| Author | Choi, Bong Geun Kim, Jae Kwang Yang, Won Jae Shim, Kwang Bo |
| Copyright Year | 2005 |
| Abstract | Diamond-like carbon (DLC) films were deposited on p-type (100) Si wafers using a plasma-enhanced chemical vapor deposition system and their structural bonding characteristics and mechanical properties were investigated as a function of the mixture ratio of methane-hydrogen gas and the bias voltage. It was found that the deposition rate increased with an increase in the flow rate of methane in the gas mixture and an increase in bias voltage. The sp/sp ratio of carbon in the films and the hardness of the films increased with an increase in the flow rate of hydrogen in the gas mixture and an increase in the bias voltage. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://jcpr.kbs-lab.co.kr/file/JCPR_vol.6_2005/JCPR6-2/Vol.6,No.2,pp.101~105_2005.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
