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Design Considerations for Mems-scale Piezoelectric Mechanical Vibration Energy Harvesters
| Content Provider | Semantic Scholar |
|---|---|
| Author | Dutoit, Noël E. Wardle, Brian L. Kim, Sang-Gook |
| Copyright Year | 2005 |
| Abstract | ABSTRACT Design considerations for piezoelectric-based energy harvesters for MEMS-scale sensors are presented, including a review of past work. Harvested ambient vibration energy can satisfy power needs of advanced MEMS-scale autonomous sensors for numerous applications, e.g., structural health monitoring. Coupled 1-D and modal (beam structure) electromechanical models are presented to predict performance, especially power, from measured low-level ambient vibration sources. Models are validated by comparison to prior published results and tests of a MEMS-scale device. A non-optimized prototype low-level ambient MEMS harvester producing 30 μW/cm3 is designed and modeled. A MEMS fabrication process for the prototype device is presented based on past work. |
| Starting Page | 121 |
| Ending Page | 160 |
| Page Count | 40 |
| File Format | PDF HTM / HTML |
| DOI | 10.1080/10584580590964574 |
| Alternate Webpage(s) | http://www.robotics.caltech.edu/~ndutoit/wiki/images/2/26/If2005.pdf |
| Alternate Webpage(s) | https://doi.org/10.1080/10584580590964574 |
| Volume Number | 71 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
