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Enhancement of sp(3)-bonding in high-bias-voltage grown diamond-like carbon thin films studied by x-ray absorption and photoemission spectroscopy.
| Content Provider | Semantic Scholar |
|---|---|
| Author | Ray, Sekhar C. Tsai, H. M. Chiou, Jau Wern Pong, W. F. Tsai, M-H Okpalugo, T. I. T. Papakonstantinou, Pagona Pi, Tunwen |
| Copyright Year | 2007 |
| Abstract | X-ray absorption near-edge structure (XANES) and valence-band photoemission spectroscopy (VB-PES) were used to elucidate the electronic and mechanical properties of diamond-like carbon (DLC) thin films deposited by the plasma-enhanced chemical vapour deposition method at various bias voltages (V(b)) using a C(2)H(2) vapour precursor in an Ar(+) atmosphere. The increase of V(b) is found to increase and decrease the contents of sp(3)- and sp(2)-bonded carbon atoms, respectively, i.e. the films become more diamond-like. The Young's modulus measurements show increases with the increase of the presence of sp(3)-bonded carbon atoms in the structure of the DLC films. |
| Starting Page | 176204 |
| Ending Page | 176204 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1088/0953-8984/19/17/176204 |
| PubMed reference number | 21690950 |
| Journal | Medline |
| Volume Number | 19 |
| Issue Number | 17 |
| Alternate Webpage(s) | http://uir.ulster.ac.uk/6399/1/Journal_of_Physics_Ray_2007.PDF |
| Alternate Webpage(s) | https://doi.org/10.1088/0953-8984%2F19%2F17%2F176204 |
| Journal | Journal of physics. Condensed matter : an Institute of Physics journal |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
