NDLI: Applying the one-column, many pencil local scanning maskless lithography technology to micro-RP system

Please wait, while we are loading the content...

Applying the one-column, many pencil local scanning maskless lithography technology to micro-RP system

Content Provider	Semantic Scholar
Author	Wang, Jia-Chang Hsieh, Ming-Zhe
Copyright Year	2009
Abstract	This paper introduces an innovative one column, many pencil local scanning maskless lithography technology used in dynamic mask and applies it to rapid prototyping (RP) system. By using this technology in micro RP system, the resolution of the 3-D microstructures can be upgraded remarkably. In addition, some relevant experiments are conducted on this micro rapid prototyping system. In the experiment, light beam is projected onto a digital mirror device (DMD) chip [Hornbeck LJ. Digital light processing: A new MEMS-based display, 4th Sensor Symp, p. 297–304 (1996)], and the image is reflected through a micro mirror. Meanwhile, by making use of zoom lens and pins array mask (PAM), the continuing pixels can be scattered. Moreover, in order to project scattered pixels onto the resin surface, the optical system is exploited. Additionally, by using a micro-stage, it is able to control the micro X-Y movement between the scattered pixels. Furthermore, this paper makes use of the spray coating technology to improve the build up capability of the overhand structures of the traditional deep dip liquid-type RP system. Finally, combining the fore-mentioned technologies, one can produce 3-D prototypes with overhand structures in higher resolution.
Starting Page	727
Ending Page	733
Page Count	7
File Format	PDF HTM / HTML
DOI	10.1007/s00170-008-1515-4
Volume Number	41
Alternate Webpage(s)	https://www.researchgate.net/profile/Jia-Chang_Wang/publication/225439363_Applying_the_one-column_many_pencil_local_scanning_maskless_lithography_technology_to_micro-RP_system/links/09e4151022e68b185f000000.pdf
Alternate Webpage(s)	https://doi.org/10.1007/s00170-008-1515-4
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

Central Library (ISO-9001:2015 Certified)
Indian Institute of Technology Kharagpur
Kharagpur, West Bengal, India | PIN - 721302

See location in the Map
03222 282435
Mail: support@ndl.gov.in

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in