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Electron density measurement in a rf helium plasma by laser‐collision induced fluorescence method
| Content Provider | Semantic Scholar |
|---|---|
| Author | Dzierżȩga, Krzysztof Musiol, Karol Benck, Eric C. Roberts, Janet |
| Copyright Year | 1996 |
| Abstract | Laser‐collision induced fluorescence (LCIF) is the emission of light from states that have been populated by laser excitation and a subsequent collision. By simultaneously measuring the LCIF from two different states, it is possible to determine both the electron density and temperature of the low energy bulk electrons within a plasma. This method is described in detail and has been applied in the determination of the total, temporally averaged, and spatially resolved electron density in a rf (13.56 MHz) helium discharge in the Gaseous Electronics Conference reference cell. The rf discharge was operated at pressures P=33.3–133.3 Pa (0.25–1.0 Torr) and peak‐to‐peak voltages of Vpp=75–300 V were applied. We found the total electron density varied from 1.8×108 cm−3 at P=33.3 Pa and Vpp=75 V to 4.0×1010 cm−3 at P=133.3 Pa and Vpp=300 V. A comparison of results from different experiments has been made. |
| Starting Page | 3196 |
| Ending Page | 3201 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.1063/1.363260 |
| Volume Number | 80 |
| Alternate Webpage(s) | https://zf.if.uj.edu.pl/sites/default/files/publikacje/1996%20JApplPhys%2080.pdf |
| Alternate Webpage(s) | https://doi.org/10.1063/1.363260 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
