Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study

Content Provider	Semantic Scholar
Author	Dervaux, J. Cormier, Pierre-Antoine Moskovkin, P. G. Douhéret, Olivier Konstantinidis, Stéphanos Lazzaroni, Roberto Lucas, Stéphane Snyders, Rony
Copyright Year	2017
Abstract	Abstract In this work, glancing angle deposition and magnetron sputtering are combined to synthesize nanostructured Ti films. Different type of microstructures (tilted columns, straight pillars, zigzags) are obtained as a function of the experimental conditions. As a support, kinetic Monte Carlo simulations are performed to understand the observed trends using the NASCAM (NAnoSCAle Modeling) code. The latter is used to simulate the growth of the films and to explain the effect on the obtained structures of experimental parameters such as the substrate temperature, the gas pressure as well as the substrate tilting and rotation speed. NASCAM enables quantitative prediction of the density, the surface roughness, and the column shape asymmetry. In addition, the effective porosity (ϕ e ) of the structures was evaluated from the simulation data for two molecules presenting different size (0.64 and 3.20 nm). The results show that ϕ e decreases with the size of the adsorbed molecule, from above 50% for the small molecule to below 10% for the larger one. This is understood by considering the accessibility of the pore as a function of the size of the molecules. These data are correlated to experimental results obtained by transmission electron microscopy.
Starting Page	644
Ending Page	657
Page Count	14
File Format	PDF HTM / HTML
DOI	10.1016/j.tsf.2017.06.006
Volume Number	636
Alternate Webpage(s)	https://pure.unamur.be/ws/portalfiles/portal/27983003/Synthesis_of_nanostructured_Ti_thin_films_by_combining_glancing_angle.pdf
Alternate Webpage(s)	https://doi.org/10.1016/j.tsf.2017.06.006
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article