Transferrable single crystalline 4H-SiC nanomembranes

Content Provider	Semantic Scholar
Author	Kim, Munho Seo, Jung Hun Zhao, Deyin Liu, Shih Chia Kim, Kwangeun Lim, Kangmook Zhou, Weidong Waks, Edo Ma, Zhenqiang
Copyright Year	2017
Abstract	In this work, we demonstrate a transferrable single crystalline 4H-SiC nanomembrane (SiC NM) released from a SiC-on-insulator (SiCOI) wafer. High resolution X-ray diffraction (XRD) and atomic force microscopy (AFM) were performed on the SiC NM and confirmed similarly good crystallinity and surface morphology. In addition, the refractive index and extinction coefficient of the SiC NM were investigated using ellipsometry analyses. Despite its thinness (i.e., 200 nm), the SiC NM achieved an absorption greater than 40% in the wavelength range of 200–260 nm with a maximum absorption of 73.8% at 256 nm. Our transferrable SiC NM provides not only good mechanical flexibility, but also exhibits excellent ultraviolet (UV) light absorption which could be readily utilized for high sensitivity flexible UV detectors.
Starting Page	264
Ending Page	268
Page Count	5
File Format	PDF HTM / HTML
DOI	10.1039/C6TC04480H
Volume Number	5
Alternate Webpage(s)	https://www.uta.edu/zhoulab/Sources/Journal%20by%20number/102%202016%20JMCC%20Kim%20SiC%20NM%20c6tc04480h.pdf
Alternate Webpage(s)	https://doi.org/10.1039/C6TC04480H
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article