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Use of adaptive RLS, LMS, and NLMS algorithms for nonlinearity modeling in a modified laser interferometer
| Content Provider | Semantic Scholar |
|---|---|
| Author | Olyaee, S. Abadi, Mohammad Shams Esfand Hamedi, Samaneh Finizadeh, Fatemeh |
| Copyright Year | 2010 |
| Abstract | Laser heterodyne interferometer is one kind of nano-metrology systems which has been widely used in industry for high-accuracy displacement measurements. The accuracy of the nano-metrology systems based on the laser heterodyne interferometers can be effectively limited by the periodic nonlinearity. In this paper, we present the nonlinearity modeling of the nano-metrology interferometric system using some adaptive filters. The adaptive algorithms consist of the least mean squares (LMS), normalized least mean squares (NLMS), and recursive least squares (RLS). It is shown that the RLS algorithm can obtain optimal modeling parameters of nonlinearity. |
| Starting Page | 264 |
| Ending Page | 269 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.1007/s12200-010-0095-8 |
| Alternate Webpage(s) | https://page-one.springer.com/pdf/preview/10.1007/s12200-010-0095-8 |
| Alternate Webpage(s) | https://doi.org/10.1007/s12200-010-0095-8 |
| Volume Number | 3 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
