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Transparent conductive aluminium and fluorine co-doped zinc oxide films via aerosol assisted chemical vapour deposition
| Content Provider | Semantic Scholar |
|---|---|
| Author | Ponja, Sapna D. Sathasivam, Sanjayan Parkin, Ivan P. Carmalt, Claire J. |
| Copyright Year | 2014 |
| Abstract | Aerosol assisted chemical vapour deposition (AACVD) was employed to synthesise highly transparent and conductive ZnO, fluorine or aluminium doped and aluminium–fluorine co-doped ZnO thin films on glass substrates at 450 °C. All films were characterised by X-ray diffraction (XRD), wavelength dispersive X-ray spectroscopy (WDX), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and UV/Vis/Near IR spectroscopy. The films were 300–350 nm thick, crystalline and displayed high transparency at 550 nm (80–90%). The co-doped film consisted of 1 at.% fluorine and 2 at.% aluminium, exhibiting a charge carrier concentration and a charge carrier mobility of 3.47 × 1020 cm−3 and 9.7 cm2 V−1 s−1, respectively. The band gap of the co-doped film was found to be 3.7 eV and the plasma edge crossover was ca. 1800 nm. This film had a highly structured morphology in comparison to the un-doped and single doped ZnO films for transparent conducting oxide applications. |
| Starting Page | 49723 |
| Ending Page | 49728 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.1039/C4RA09997D |
| Volume Number | 4 |
| Alternate Webpage(s) | http://discovery.ucl.ac.uk/1457587/1/Carmalt_Co-dopedZnOpaper%20-%20RSC%20advances%20submitted-1.pdf |
| Alternate Webpage(s) | https://pubs.rsc.org/en/content/getauthorversionpdf/C4RA09997D |
| Alternate Webpage(s) | https://doi.org/10.1039/C4RA09997D |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
