NDLI: Making Phase Change Memory Materals Cross Reference to Related Applications

Content Provider	Semantic Scholar
Copyright Year	2017
Abstract	(54) TELLURIUM (TE) PRECURSORS FOR (60) Provisional application No. 60/913,798, filed on Apr. MAKING PHASE CHANGE MEMORY 24, 2007. MATERLALS Publication Classification (71) Applicant: Air Products and Chemicals, Inc., Allentown, PA (US) (51) Int. Cl. C23C I6/06 (2006.01) (72) Inventors: Manchao Xiao, San Diego, CA (US); C23C I6/56 (2006.01) Thomas Richard Gaffney, Carlsbad, COB 9/00 (2006.01) CA (US) (52) U.S. Cl. CPC ............... C23C 16/06 (2013.01); COIB 19/002 (73) Assignee: AIR PRODUCTS AND CHEMICALS, (2013.01); C23C I6/56 (2013.01) INC. Allentown, PA (US) USPC ... 423/508; 427/419.8; 427/535; 427/255.28
File Format	PDF HTM / HTML
Alternate Webpage(s)	https://patentimages.storage.googleapis.com/07/bf/fb/7fc3f22fe08ed2/US20130129603A1.pdf
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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