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Dense and smooth amorphous films of multicomponent FeCoNiCuVZrAl high-entropy alloy deposited by direct current magnetron sputtering
| Content Provider | Semantic Scholar |
|---|---|
| Author | Liu, Lianhe Hou, Chao Li, Jian Chen Jiang, Q. |
| Copyright Year | 2013 |
| Abstract | Abstract The multicomponent amorphous nitride films of FeCoNiCuVZrAl high-entropy alloy were deposited by direct current magnetron sputtering in the mixture atmosphere of Ar and N 2 . The systematical investigations demonstrate that the chemical composition, microstructure, and mechanical properties of the amorphous films intimately rely on the concentration of N 2 in the atmosphere mixture. When N 2 flow ratio increases from 0% to 50%, the thickness of the films decreases, whereas the roughness firstly decreases and then increases. At the N 2 flow ratio of 30%, a perfect dense and smooth amorphous nitride film could be achieved. While the hardness and Young’s modulus of the film reach the maximum values of 12 and 166 GPa, respectively. |
| Starting Page | 675 |
| Ending Page | 679 |
| Page Count | 5 |
| File Format | PDF HTM / HTML |
| DOI | 10.1016/j.matdes.2012.11.001 |
| Alternate Webpage(s) | http://jiangq.weebly.com/uploads/1/1/7/2/11725009/md132.pdf |
| Alternate Webpage(s) | https://doi.org/10.1016/j.matdes.2012.11.001 |
| Volume Number | 46 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
