NDLI: Pb ( Zr , Ti ) O 3 Thin Films on Zirconium Membranes for Micromechanical Applications

Content Provider	Semantic Scholar
Author	Maeder, Thomas Muralt, Paul Sagalowicz, L. Reaneya, I. Kohli, Martin M. Kholkin, Andrej Setter, Nava
Copyright Year	2014
Abstract	An efficient, electrically conductive, chemical barrier for the integration of piezoelectric Pb(Zr,Ti)O3 (PZT) films on reactive metal substrates has been developed, opening new possibilities for PZT integration on micromechanical and semiconductor devices, Very reactive zirconium films have been taken in order to test the quality of the specially designed RuO2/Cr buffer under the condition of in situ sputter deposition of PZT at 600°C. The PZT/RuO2 interface was found to be free of intermediate phases. A PZT activated metallic micromechanical element was demonstrated with a thin film Zr membrane.
File Format	PDF HTM / HTML
Alternate Webpage(s)	https://infoscience.epfl.ch/record/88854/files/1996%20Maeder%20APL%20-%20films%20minces%20PZT%20sur%20membranes%20Zr-Cr-RuO2%20-%20perso.pdf
Language	English
Access Restriction	Open
Subject Keyword	Buffers Chemical vapor deposition Electricity Interface Device Component Lead Piezoelectric Elastic Modulus Scanner Piezoelectricity Semiconductor device Semiconductors Sputter deposition Tissue membrane Trial Inclusion and Exclusion Criteria Submission Domain Zirconium
Content Type	Text
Resource Type	Article

Central Library (ISO-9001:2015 Certified)
Indian Institute of Technology Kharagpur
Kharagpur, West Bengal, India | PIN - 721302

See location in the Map
03222 282435
Mail: support@ndl.gov.in

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in