Loading...
Please wait, while we are loading the content...
Air-clad silicon pedestal structures for broadband mid-infrared microphotonics.
| Content Provider | Semantic Scholar |
|---|---|
| Author | Singh, Vivek Narayan Kimerling, Lionel C. Agarwal, Anu |
| Copyright Year | 2013 |
| Abstract | Toward mid-infrared (mid-IR) silicon microphotonic circuits, we demonstrate broadband on-chip silicon structures, such as: (i) straight and bent waveguides and (ii) beam splitters, utilizing an air-clad pedestal configuration which eliminates the need for typical mid-IR-lossy oxide cladding. We illustrate a sophisticated fabrication process that can create high-quality pedestal structures in crystalline silicon, while preserving its mid-IR transparency. A fundamental waveguide mode is observed between λ=2.5 μm and λ=3.7 μm, and an optical loss of 2.7 dB/cm is obtained at λ=3.7 μm. Our pedestal silicon structures show 50:50 mid-IR power splitting enabling the further development of mid-IR silicon microphotonics. |
| File Format | PDF HTM / HTML |
| DOI | 10.1364/OL.38.001031 |
| Alternate Webpage(s) | http://dspace.mit.edu/openaccess-disseminate/1721.1/79727 |
| Alternate Webpage(s) | https://dspace.mit.edu/bitstream/handle/1721.1/79727/Kimerling_Air-clad%20silicon.pdf?isAllowed=y&sequence=1 |
| PubMed reference number | 23546233 |
| Alternate Webpage(s) | https://doi.org/10.1364/OL.38.001031 |
| Journal | Medline |
| Volume Number | 38 |
| Issue Number | 7 |
| Journal | Optics letters |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
