Loading...
Please wait, while we are loading the content...
Similar Documents
Diaphragm shape effect on the sensitivity of surface acoustic wave based pressure sensor for harsh environment
| Content Provider | Semantic Scholar |
|---|---|
| Author | Wang, Tao Mu, Xiaojing Randles, Andrew B. Gu, Yuandong Lee, Chengkuo |
| Copyright Year | 2015 |
| Abstract | Aluminum Nitride (AlN) based surface acoustic wave (SAW) pressure sensors for harsh environment applications are of great interest in recent years. Such sensor employs a thick diaphragm (∼50 μm) to endure the high pressure, but this seriously limits the sensitivity of these devices. Understanding of the working mechanism and the effect of geometrical parameters will yield the design principles to achieve improved sensitivity. In this letter, the effect of diaphragm on the performance of SAW pressure sensors is studied. AlN based SAW resonators on (100) wafer with different diaphragm shapes are fabricated, packaged, and characterized. Pressure coefficient of frequency (PCF) of pressure sensors with circular diaphragm, rectangular diaphragm (small aspect ratio) and rectangular diaphragm (large aspect ratio) is found to be 0.071 ppm/psi, 0.038 ppm/psi, and −0.171 ppm/psi, respectively. The longitudinal and lateral strains along the SAW propagation direction (〈100〉 direction) have the opposite effects on the ... |
| Starting Page | 123501 |
| Ending Page | 123501 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1063/1.4931363 |
| Volume Number | 107 |
| Alternate Webpage(s) | https://www.ece.nus.edu.sg/stfpage/elelc/Publication/2015/APL_15V107_Diaphragm%20shape%20effect%20on%20the%20sensitivity%20of%20surface%20acoustic%20wave%20based%20pressure%20sensor%20for%20harsh%20environment.pdf |
| Alternate Webpage(s) | https://doi.org/10.1063/1.4931363 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
