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Programmable reconfigurable self-assembly: parallel heterogeneous integration of chip-scale components on planar and nonplanar surfaces
| Content Provider | Semantic Scholar |
|---|---|
| Author | Chung, Jaehoon Zheng, Wei Hatch, T. J. Jacobs, H. |
| Copyright Year | 2006 |
| Abstract | This paper reports on a programmable reconfigurable self-assembly (PRS) process to enable heterogeneous integration of components on nonplanar substrates. The proposed process makes use of solder-based receptors that can be activated electrically. Metal contacts on segmented semiconductor devices bind to liquid-solder-based-receptors on a substrate during the fluidic self-assembly. Programmability is implemented using solder-based receptors that can be switched "ON" and "OFF" using integrated heaters. We have evaluated the feasibility of the proposed PRS concept through computer simulations using ANSYS to estimate: i) the necessary power to heat selected receptors to above the melting point of the solder and ii) the minimal spacing between receptors for preventing thermal crosstalk. A prototype platform has been fabricated to experimentally test the PRS process. The programmable sequential assembly of multiple types of components onto target positions has been demonstrated, including 300-/spl mu/m-sized light-emitting diodes (LEDs) and silicon dies. Three types of defects were identified and eliminated using improved component designs, transient heating, and adequate heat sinks. A prototype color LED display segment that contains a total of 36 red, green, and yellow LED segments and 72 interconnects has been used to test the concept. The outlined process provides a new concept to the parallel integration of microdevices and systems that require electrical interconnects between components. |
| Starting Page | 457 |
| Ending Page | 464 |
| Page Count | 8 |
| File Format | PDF HTM / HTML |
| DOI | 10.1109/JMEMS.2006.872226 |
| Volume Number | 15 |
| Alternate Webpage(s) | http://www.ece.umn.edu/users/hjacobs/publications/2006JMEMS01638470.pdf |
| Alternate Webpage(s) | http://www.ece.umn.edu/users/hjacobs/publications/2006MEMS-Chung.pdf |
| Alternate Webpage(s) | http://people.ece.umn.edu/users/hjacobs/publications/2006JMEMS01638470.pdf |
| Alternate Webpage(s) | https://doi.org/10.1109/JMEMS.2006.872226 |
| Journal | Journal of Microelectromechanical Systems |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
