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High-resolution differential interference contrast X-ray zone plates : Design and fabrication ☆
| Content Provider | Semantic Scholar |
|---|---|
| Author | Lindblom, Magnus Tuohimaa, Tomi T. Holmberg, Anders Wilhein, T. Hambach Hertz, Hans M. Vogt, Ulrich F. |
| Copyright Year | 2007 |
| Abstract | Differential interference contrast is a potentially powerful technique for contrast enhancement in soft X-ray microscopy. We describe the design and fabrication of single-element diffractive optical elements suitable as objectives for high-resolution differential interference contrast microscopy in the water-window spectral range. A one-dimensional pattern calculation followed by an extension to two dimensions results in a pattern resolution of 1 nm, which is well below fabrication accuracy. The same fabrication process as for normal zone plates is applicable, but special care must be taken when converting the calculated pattern to a code for e-beam lithography. © 2007 Elsevier B.V. All rights reserved. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www-old.biox.kth.se/publications/2007-pdfs/Lindblom_Spchi_Acta_B62.pdf |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Diagnostic radiologic examination Dimensions Dyspnea on exertion Experiment FOCAL (programming language) Fused filament fabrication Image resolution Interference (communication) Microscope Device Component Semiconductor device fabrication Software propagation Synchrotrons width |
| Content Type | Text |
| Resource Type | Article |