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Lithium ion beams from liquid metal alloy ion sources
| Content Provider | Semantic Scholar |
|---|---|
| Author | Pilz, Wolfgang Klingner, N. Bischoff, Lothar Mazarov, Paul Bauerdick, Sven |
| Copyright Year | 2019 |
| Abstract | In recent years, focused ion beam (FIB) processing has been developed into a well-established and promising technique in nearly all fields of nanotechnology for patterning and prototyping on the μm-scale and below. Liquid metal alloy ion sources (LMAIS) represent a promising alternative to expand the FIB application fields besides all other source concepts. The need of light elements like Li was investigated using various alloys. A promising candidate is a Ga35Bi60Li5 based LMAIS, which is introduced in more detail and which operates stably for more than 1000 μA h. It enables a highly resolved imaging with (4.0 ± 0.6) nm edge resolution (20%–80%) and patterning using Li, Ga, or heavy polyatomic Bi clusters, all coming from one ion source.In recent years, focused ion beam (FIB) processing has been developed into a well-established and promising technique in nearly all fields of nanotechnology for patterning and prototyping on the μm-scale and below. Liquid metal alloy ion sources (LMAIS) represent a promising alternative to expand the FIB application fields besides all other source concepts. The need of light elements like Li was investigated using various alloys. A promising candidate is a Ga35Bi60Li5 based LMAIS, which is introduced in more detail and which operates stably for more than 1000 μA h. It enables a highly resolved imaging with (4.0 ± 0.6) nm edge resolution (20%–80%) and patterning using Li, Ga, or heavy polyatomic Bi clusters, all coming from one ion source. |
| Starting Page | 021802 |
| Ending Page | 021802 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1116/1.5086271 |
| Volume Number | 37 |
| Alternate Webpage(s) | https://www.hzdr.de/publications/PublDoc-12989.pdf |
| Alternate Webpage(s) | https://doi.org/10.1116/1.5086271 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
