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Femtosecond laser three-dimensional microstructuring inside photosensitive glasses
| Content Provider | Semantic Scholar |
|---|---|
| Author | Fisette, Bruno Meunier, Michel |
| Copyright Year | 2004 |
| Abstract | Femtosecond laser is used to form three-dimensional (3D) microstructures embedded in Foturan, a photosensitive glass. The microstructures are realized using a three steps process including infrared femtosecond exposure, heating process and etching in an ultrasonic solution of hydrofluoric acid in water. The experiments were carried out using a specially designed ultrafast laser micromachining station, which included a femtosecond laser (Spectra Physics, 170fs, 800nm, 1 mJ/pulse at repetition rate of 1kHz), systems for the delivery, high-precision focusing and spatial-temporal control of the laser beam, and a fully automated and programmed system for the precise target positioning over a prescribed 3D trajectory. Efficiency of the fabrication process is discussed in terms of the various laser and etching fabrication parameters. An example of the fabrication of a 3D microfluidic system for biomedical applications is presented. |
| File Format | PDF HTM / HTML |
| DOI | 10.1117/12.567244 |
| Volume Number | 5578 |
| Alternate Webpage(s) | https://www.polymtl.ca/lp2l/Articles/2005-Fisette-SPIE-Glass.pdf |
| Alternate Webpage(s) | https://doi.org/10.1117/12.567244 |
| Journal | Photonics North |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
