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High efficiency light-induced dielectrophoresis biochip prepared using CVD techniques
| Content Provider | Semantic Scholar |
|---|---|
| Author | Wu, Hung-Wei Huang, Ye Lee, Hsin-Ying Tsai, Wu-Han Chen, Kuan-Yu Jian, Li-Yi |
| Copyright Year | 2016 |
| Abstract | This article describes a high-efficiency light-induced dielectrophoresis biochip containing a thin film prepared through inductively coupled plasma chemical vapor deposition (ICPCVD). The biochip comprises two ITO glass substrates and a photoconductive amorphous silicon thin film. The biochip can effectively sort particular particles (or cells) by projecting visible light onto the surface of the silicon thin film. The sorting efficiency of biochips is highly associated with the quality of the deposited amorphous silicon thin films; therefore, the choice of deposition technique is extremely critical. However, no study has examined this problem. Hence, the current study thoroughly compared the efficiency of the biochip when films produced through plasma-enhanced chemical vapor deposition and ICPCVD are used. |
| Starting Page | 1 |
| Ending Page | 5 |
| Page Count | 5 |
| File Format | PDF HTM / HTML |
| DOI | 10.1007/s10544-016-0107-6 |
| PubMed reference number | 27530346 |
| Journal | Medline |
| Volume Number | 18 |
| Alternate Webpage(s) | http://ir.lib.ksu.edu.tw/bitstream/987654321/26473/2/High%20efficiency%20LIDEP%20biochip%20prepared%20using%20CVD%20techniques2.pdf |
| Alternate Webpage(s) | https://doi.org/10.1007/s10544-016-0107-6 |
| Journal | Biomedical microdevices |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
