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Numerical Study on Discharge Characteristics of a Line-Shaped Microwave Plasma with a Rectangular Slotted Waveguide
| Content Provider | Semantic Scholar |
|---|---|
| Author | Tsuji, Akihiro Yasaka, Yasuyoshi Takeno, Hiromasa Fukasawa, Takayuki Fujii, Shuitsu |
| Copyright Year | 2009 |
| Abstract | A three-dimensional fluid simulation code has been developed for investigating characteristics of wave propagations and plasma productions in a line-shaped plasma device. In numerical analyses of the wave propagations, it is shown that distributions of power absorption depending on the wave propagations change by adjusting a width of a waveguide and an insertion depth of the plasma to the waveguide and both spatial and plasma resonances arise near the plasma surface. In addition, the simulation in a certain condition shows that the device can produce the plasma with good uniformity in the longitudinal direction. These results given by computational studies theoretically support to explain the characteristics of the line-shaped plasma produced in the device and indicate that the distributions of the wave propagations and the plasmas can be controlled by adjusting the width of the waveguide and/or the insertion depth of the plasma to the waveguide. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.jspf.or.jp/JPFRS/PDF/Vol8/jpfrs2009_08-0794.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
