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Electrochemical Deposition of Conformal and Functional Layers on High Aspect Ratio Silicon Micro/Nanowires.
| Content Provider | Semantic Scholar |
|---|---|
| Author | Ozel, Tuncay Zhang, Benjamin A. Gao, Ruixuan Day, Robert Watson Lieber, Charles M. Nocera, Daniel G. |
| Copyright Year | 2017 |
| Abstract | Development of new synthetic methods for the modification of nanostructures has accelerated materials design advances to furnish complex architectures. Structures based on one-dimensional (1D) silicon (Si) structures synthesized using top-down and bottom-up methods are especially prominent for diverse applications in chemistry, physics, and medicine. Yet further elaboration of these structures with distinct metal-based and polymeric materials, which could open up new opportunities, has been difficult. We present a general electrochemical method for the deposition of conformal layers of various materials onto high aspect ratio Si micro- and nanowire arrays. The electrochemical deposition of a library of coaxial layers comprising metals, metal oxides, and organic/inorganic semiconductors demonstrate the materials generality of the synthesis technique. Depositions may be performed on wire arrays with varying diameter (70 nm to 4 μm), pitch (5 μ to 15 μ), aspect ratio (4:1 to 75:1), shape (cylindrical, conical, hourglass), resistivity (0.001-0.01 to 1-10 ohm/cm2), and substrate orientation. Anisotropic physical etching of wires with one or more coaxial shells yields 1D structures with exposed tips that can be further site-specifically modified by an electrochemical deposition approach. The electrochemical deposition methodology described herein features a wafer-scale synthesis platform for the preparation of multifunctional nanoscale devices based on a 1D Si substrate. |
| Starting Page | 4502 |
| Ending Page | 4507 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://cml.harvard.edu/assets/Nocera-Lieber_NanoLettASAP_6-24-17_SI.pdf |
| PubMed reference number | 28621537v1 |
| Alternate Webpage(s) | https://doi.org/10.1021/acs.nanolett.7b01950 |
| DOI | 10.1021/acs.nanolett.7b01950 |
| Journal | Nano letters |
| Volume Number | 17 |
| Issue Number | 7 |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Architecture as Topic Aspect Ratio Diameter (qualifier value) Metals Nanostructured Materials Nanowires Oxides Polymers Semiconductors Silicon anatomical layer metal oxide ohm |
| Content Type | Text |
| Resource Type | Article |
