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Aluminum Filmand Polishing Method for Polishing Alumnum Filmusing the Same
| Content Provider | Semantic Scholar |
|---|---|
| Author | Parvini, Pegah |
| Copyright Year | 2017 |
| Abstract | Chinese Office Action dated Jan. 9, 2009, issued in corresponding Chinese Patent Application No. 2006-800431006. International Search Report in PCT/JP2006/322650 issued by ISA/ JP on Dec. 12, 2006; PCT ISA 210, pp. 1-2. Written Opinion in PCT/JP2006/322650 issued by ISA/JP on Dec. 12, 2006; PCT/ISA/237, 3 pgs. Notification of Transmittal of Translation of the International Pre liminary Reporton Patentability (Form PCT/IB/338) of International Application No. PCT/JP2006/322650 mailed Jun. 19, 2008 with Forms PCT, IB,373 and PCTISAF237. F.B. Kaufman et al.; "Chemical-Mechanical Polishing for Fabricat ing Patterned W Metal Features as Chip Interconnects”, Journal of the Electrochemical Society, vol. 138, No. 11, 1991, pp. 3460-3465. Korean Office Action, issued Apr. 30, 2010 for corresponding Korean Patent Application No. 10-2008-701 1430. Korean Office Action dated Nov. 24, 2010, issued in corresponding Korean Patent Application No. 10-2008-701 1430. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/d9/ab/33/d6dd0e0dab2072/US7887609.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |