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Ion behavior in capacitively-coupled dual-frequency discharges
| Content Provider | Semantic Scholar |
|---|---|
| Author | Donk'o, Zolt'an Petrović, Zoran Lj. |
| Copyright Year | 2007 |
| Abstract | Particle-in-cell (PIC/MCC) simulations of capacitively-coupled Ar, CF4, and CF4/Ar discharges excited by a single RF source or by two sources of different frequencies are presented. The properties and the formation mechanism of the flux-energy distribution of the ions reaching the electrodes is analyzed in detail. It is demonstrated that at low pressures the ion energy and the ion flux can nearly independently be controlled by properly choosing the excitation frequencies. |
| Starting Page | 012011 |
| Ending Page | 012011 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1088/1742-6596/86/1/012011 |
| Volume Number | 86 |
| Alternate Webpage(s) | http://plasma.szfki.kfki.hu/~zoli/pdfs/JPConf_2007_Donko_Ion_behavior_in_capacitively-coupled_dual-frequency_discharges.pdf |
| Alternate Webpage(s) | https://doi.org/10.1088/1742-6596%2F86%2F1%2F012011 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
