NDLI: New insights into reliability of electrostatic capacitive RF MEMS switches

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New insights into reliability of electrostatic capacitive RF MEMS switches

Content Provider	Semantic Scholar
Author	Zaghloul, Usama Papaioannou, George J. Coccetti, Fabio Pons, Patrick Plana, Robert
Copyright Year	2011
Abstract	HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L’archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d’enseignement et de recherche français ou étrangers, des laboratoires publics ou privés. New insights into reliability of electrostatic capacitive RF MEMS switches Heiba Usama Zaghloul, George Papaioannou, Bharat Bhushan, Fabio Coccetti, Patrick Pons, Robert Plana
Starting Page	571
Ending Page	586
Page Count	16
File Format	PDF HTM / HTML
DOI	10.1017/S1759078711000766
Volume Number	3
Alternate Webpage(s)	https://hal.archives-ouvertes.fr/hal-00795987/file/New_insight_into_reliability_of_electrostatic_capacitive_RF_MEMS_switches.pdf
Alternate Webpage(s)	http://hal.inria.fr/docs/00/79/59/87/PDF/New_insight_into_reliability_of_electrostatic_capacitive_RF_MEMS_switches.pdf
Alternate Webpage(s)	https://hal.archives-ouvertes.fr/hal-00795987/document
Alternate Webpage(s)	https://doi.org/10.1017/S1759078711000766
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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