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Nanoelectromechanical system-integrated detector with silicon nanomechanical resonator and silicon nanochannel field effect transistor
| Content Provider | Semantic Scholar |
|---|---|
| Author | Wenzler, Josef-Stefan Dunn, Tyler J. Erramilli, Shyamsunder Mohantya, Pritiraj |
| Copyright Year | 2009 |
| Abstract | We demonstrate the fabrication and operation of an integrated device containing a nanoelectromechanical system and an integrated detector. This on-chip silicon nanochannel field effect transistor is used to measure the motion of a silicon nanomechanical resonator at room temperature. Furthermore, we describe the operation of the device as a silicon-based room-temperature on-chip amplifier for improved displacement detection of nanomechanical resonators. © 2009 American Institute of Physics. DOI: 10.1063/1.3122040 |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://physics.bu.edu/femtospec/Wenzler_Dunn_Mohanty_Erramilli_2009.pdf |
| Alternate Webpage(s) | http://ultra.bu.edu/papers/Erramilli-Nanoelectromechanical%20system%20integrated...-missing%20from%20site.pdf |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Amplifier Detectors Digital Object Identifier Displacement mapping Field effect (semiconductor) Nanochannel Psychologic Displacement Resonator Device Component Silicon Transistor Device Component |
| Content Type | Text |
| Resource Type | Article |
