NDLI: Submicron silicon waveguide optical switch driven by microelectromechanical actuator

Content Provider	Semantic Scholar
Author	Bulgan, Erdal Kanamori, Yoshiaki Hane, Kazuhiro
Copyright Year	2008
Abstract	A submicron silicon waveguide optical switch driven by a microelectromechanical actuator is fabricated. The switch is composed of single-mode silicon input and output waveguides and a movable waveguide suspended by silicon springs. Switching occurs when the air gap between input and output waveguides is closed by displacing the movable waveguide 540±20nm by an electrostatic comb actuator. The switch, fabricated on a silicon-on-insulator wafer, is monolithic, and active switching region is as small as about 40×60μm2. An extinction ratio of 15±2dB is experimentally obtained between switch off and on states at 1.55μm wavelength.
Starting Page	101110
Ending Page	101110
Page Count	1
File Format	PDF HTM / HTML
DOI	10.1063/1.2892677
Volume Number	92
Alternate Webpage(s)	http://akademi.itu.edu.tr/erdalbulgan/DosyaGetir/76248/APL2008-1.pdf
Alternate Webpage(s)	https://doi.org/10.1063/1.2892677
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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