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On-Chip Integrated Silicon Bulk-Micromachined Soil Moisture Sensor Based on the DPHP Method
| Content Provider | Semantic Scholar |
|---|---|
| Author | Valente, António Couto, Carlos Correia, José Higino |
| Copyright Year | 2001 |
| Abstract | This paper reports the design, modelling, fabrication and assembly of a silicon bulk-micromachined soil moisture microsensor using the Dual-Probe Heat-Pulse (DPHP) method. Soil humidity measurement is essential to study soil preservation and control the development of plants, namely in closed ecosystem. The DPHP method uses a heater (Peltier effect) and a temperature probe (Seebeck effect) to determine the volumetric heat capacity of the soil and hence water content (θ ν ). This is the first time that the DPHP method is implemented in a microdevice and the first integrated sensor for soil moisture. This microdevice is more suited to measure at different soil depths in a non-destructive and automated manner. |
| Starting Page | 316 |
| Ending Page | 319 |
| Page Count | 4 |
| File Format | PDF HTM / HTML |
| DOI | 10.1007/978-3-642-59497-7_75 |
| Alternate Webpage(s) | http://repositorium.sdum.uminho.pt/bitstream/1822/5426/1/AV_EU01.pdf |
| Alternate Webpage(s) | https://doi.org/10.1007/978-3-642-59497-7_75 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
