NDLI: INVITED] Sensing properties of micro-cavity in-line Mach-Zehnder interferometer enhanced by reactive ion etching

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INVITED] Sensing properties of micro-cavity in-line Mach-Zehnder interferometer enhanced by reactive ion etching

Content Provider	Semantic Scholar
Author	Janik, Monika Koba, Marcin Celebanska, Anna Bock, Wojtek J. Śmietana, Mateusz
Copyright Year	2018
Abstract	Abstract In this work, we discuss an application of reactive ion etching (RIE) for enhancing the sensing properties of a micro-cavity in-line Mach-Zehnder interferometer (µIMZI). The µIMZI was fabricated using femtosecond laser micromachining in a standard single-mode fiber as a circular hole with a diameter of 54 µm. Next, the structures underwent two kinds of RIE using as reactive gases: sulfur hexafluoride (SF6) and oxygen (O2) mixtures (SF6/O2) or O2 itself. When RIE with SF6/O2 was applied, it allowed for an efficient and well-controlled etching of the fabricated structure at nanometers level observed as an increase in spectral depths of the minima in the µIMZI transmission spectrum. A similar RIE process with O2 alone was ineffective. The well-defined minima obtained with the SF6/O2 RIE significantly improved the resolution of measurements made with the µIMZI. The effect was demonstrated for high-resolution refractive index (RI) measurements of liquids in the cavity. The result of the RIE process was to clean the micro-cavity bottom, increase its depth, and smooth its sidewalls. As an additional effect, the wettability of the micro-cavity surface was improved, making the RI measurements faster and more repeatable. Moreover, we demonstrated that RIE with SF6/O2 results in more stable wettability improvement than when O2 is applied as a reactive gas.
Starting Page	260
Ending Page	266
Page Count	7
File Format	PDF HTM / HTML
DOI	10.1016/j.optlastec.2018.01.045
Volume Number	103
Alternate Webpage(s)	http://w3.uqo.ca/photonique/papers/Sensing%20properties%20of%20micro-cavity%20in-line%20Mach-Zehnder.pdf
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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