NDLI: TaAl-N Thin Film Prepared by Radio Frequency and Direct Current Reactive Sputtering

Content Provider	Semantic Scholar
Author	Okano, Yukiko Tajiri, Shuichi Aozono, Takashi Okamoto, Akio Ogawa, Soichi Mima, Hiroshi
Copyright Year	2008
Abstract	TaAlN Thin Film Prepared by Radio Frequency and Direct Current Reactive Sputtering Yukiko OKANO1, Shuichi TAJIRI1, Takashi AOZONO1, Akio OKAMOTO2, Soichi OGAWA3 and Hiroshi MIMA3 1Okano Works, Ltd., 168 Taima-cho, Neyagawa, Osaka, 5720078 2Technology Research Institute of Osaka Prefecture, 271 Ayumino, Izumi, Osaka, 5941157 3Ogawa Creation Research Laboratory, 7187 Kariguchidai, Tarumi, Kobe, 6550049 4Osaka City University, 33138 Sugimoto, Sumiyoshi, Osaka, 5588585
File Format	PDF HTM / HTML
Alternate Webpage(s)	https://www.jstage.jst.go.jp/article/jvsj2/51/3/51_3_208/_pdf/-char/ja
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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