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FIB/SEM Tomography of Porous Ceramics
| Content Provider | Semantic Scholar |
|---|---|
| Author | Rezikyan, Aram |
| Copyright Year | 2016 |
| Abstract | 3D visualization enabled by dual beam microscopes combining Focused Ion Beam and Scanning Electron Microscopy (FIB/SEM) technology became a versatile materials morphology characterization technique [1-5]. It provides higher voxel resolution compared to X-ray tomography – tens of nanometers or, in some cases, even several nanometers. Even higher resolution is achievable by Transmission Electron Microscopy (TEM) tomography. However, it limits the analysis to a much smaller domain. Further sophistication of analysis is achieved by collecting EDX signal along with the secondary electron (SE) or backscattered electron (BSE) signal, albeit with a reduced resolution and significantly increased time consumption. |
| Starting Page | 1884 |
| Ending Page | 1885 |
| Page Count | 2 |
| File Format | PDF HTM / HTML |
| DOI | 10.1017/S1431927616010266 |
| Volume Number | 22 |
| Alternate Webpage(s) | http://journals.cambridge.org/fulltext_content/supplementary/MAM22_S3_minisite/7337/1884.pdf |
| Alternate Webpage(s) | https://doi.org/10.1017/S1431927616010266 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
