NDLI: Temperature Compensation of Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode

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Temperature Compensation of Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode

Content Provider	Semantic Scholar
Author	Lin, Chih-Ming
Copyright Year	2012
Abstract	Abstract : Frequency references with a low phase noise and a low temperature-induced frequency drift are important components for navigation systems, wireless communication systems, and signal processing applications. As is well known, crystal oscillators (XOs) and temperature compensated crystal oscillators (TCXOs) based on AT-cut quartz dominate this market because AT-cut quartz has outstanding frequency-temperature performance and long-term stability. However, there are drawbacks and fabrication limitations for quartz-based resonators related to down-scaling for future applications. In addition, the material properties of quartz limit the integration of the frequency references and the complementary metal-oxide semiconductor (CMOS) circuits on a single chip. As a result, there has been a great interest in the realization of low-cost, CMOS-compatible, high quality factor (Q), and temperature-stable micro-electro-mechanical systems (MEMS) resonators.
File Format	PDF HTM / HTML
Alternate Webpage(s)	http://www.dtic.mil/dtic/tr/fulltext/u2/a575482.pdf
Alternate Webpage(s)	http://www.eecs.berkeley.edu/Pubs/TechRpts/2012/EECS-2012-264.pdf
Alternate Webpage(s)	http://digitalassets.lib.berkeley.edu/techreports/ucb/text/EECS-2012-264.pdf
Alternate Webpage(s)	https://apps.dtic.mil/dtic/tr/fulltext/u2/a575482.pdf
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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