NDLI: Electron-Beam-Induced Deposition of Carbon Nanorod via Spot Mode as Highly Stable and Sensitive AFM Probe Tip

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Electron-Beam-Induced Deposition of Carbon Nanorod via Spot Mode as Highly Stable and Sensitive AFM Probe Tip

Content Provider	Semantic Scholar
Author	Qian, Wen Nguyen, Charles Turner, Joseph A. Liu, Dalie
Copyright Year	2017
Abstract	Precise fabrication of high-aspect ratio and sharp carbon probe tips for atomic force microscopy (AFM) has been investigated by use of electron-beam-induced deposition (EBID) via spot mode, which can be easily produced in large quantities with high repeatability. The EBID process and subsequent SEM imaging were performed in an FEI Helios NanoLab 660. Selection of electron beam voltage, current, and deposition time is critical for determining the radius and height of the resulting tip, while optimal focus and astigmatism correction are crucial for precise and repeatable production of a sharp tip. Through systematic testing, an electron beam voltage of 18 kV and beam current of 50 pA has been proved to produce tips with the smallest radius-of-curvature (15±5 nm) via spot mode.
Starting Page	1736
Ending Page	1737
Page Count	2
File Format	PDF HTM / HTML
DOI	10.1017/S1431927617009345
Alternate Webpage(s)	http://minisites.cambridgecore.org/MAM2017/7337/1736.pdf
Alternate Webpage(s)	https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S1431927617009345
Alternate Webpage(s)	https://doi.org/10.1017/S1431927617009345
Volume Number	23
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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