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Top-down fabrication of fully CMOS-compatible silicon nanowire arrays and their integration into CMOS Inverters on plastic.
| Content Provider | Semantic Scholar |
|---|---|
| Author | Lee, Myeongwon Jeon, Youngin Moon, Taeho Kim, Sangsig |
| Copyright Year | 2011 |
| Abstract | A route to the top-down fabrication of highly ordered and aligned silicon nanowire (SiNW) arrays with degenerately doped source/drain regions from a bulk Si wafer is presented. In this approach, freestanding n- and p-SiNWs with an inverted triangular cross section are obtained using conventional photolithography, crystal orientation dependent wet etching, size reduction oxidation, and ion implantation doping. Based on these n- and p-SiNWs transferred onto a plastic substrate, simple SiNW-based complementary metal-oxide-semiconductor (CMOS) inverters are constructed for the possible applications of these SiNW arrays in integrated circuits on plastic. The static voltage transfer characteristic of the SiNW-based CMOS inverter exhibits a voltage gain of ∼9 V/V and a transition of 0.32 V at an operating voltage of 1.5 V with a full output voltage swing between 0 V and V(DD), and its mechnical bendability indicates good fatigue properties for potential applications of flexible electronics. This novel top-down approach is fully compatible with the current state-of-the-art Si-based CMOS technologies and, therefore, offers greater flexibility in device design for both high-performance and low-power functionality. |
| File Format | PDF HTM / HTML |
| DOI | 10.1021/nn102594d |
| PubMed reference number | 21355599 |
| Journal | Medline |
| Volume Number | 5 |
| Issue Number | 4 |
| Alternate Webpage(s) | http://user.dankook.ac.kr/~taehom/thesis/24.Top-Down%20Fabrication%20of%20Fully%20CMOS-Compatible%20Silicon%20Nanowire%20Arrays%20and%20Their%20Integration%20into%20CMOS%20Inverters~.pdf |
| Alternate Webpage(s) | https://doi.org/10.1021/nn102594d |
| Journal | ACS nano |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
