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Carbon nanotube technologies for future ULSI via interconnects
| Content Provider | Semantic Scholar |
|---|---|
| Author | Awano, Yuji |
| Copyright Year | 2005 |
| Abstract | We demonstrate the advantages of carbon nanotubes (CNTs) for ULSI interconnections, which we believe that it must be one of the most promising applications for metallic carbon nanotubes. We report present status of CNT material technologies and the potential of metallic CNT vias for future ULSI interconnections. |
| File Format | PDF HTM / HTML |
| DOI | 10.1117/12.580083 |
| Volume Number | 5732 |
| Alternate Webpage(s) | https://confit.atlas.jp/guide/event-img/ssdm2004/B-2-1/public/pdf_archive?type=in |
| Alternate Webpage(s) | https://doi.org/10.1117/12.580083 |
| Journal | SPIE OPTO |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |