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Directed self-assembly for high-density bit-patterned media fabrication using spherical block copolymers
| Content Provider | Semantic Scholar |
|---|---|
| Author | Xiao, Shuaigang Yang, Xiaomin Hwu, Justin Jia-Jen Wago, Koichi Kuo, David |
| Copyright Year | 2013 |
| Abstract | Abstract. Bit-patterned media (BPM) fabrication sets a high bar for nanopatterning especially in the aspects of lithography resolution and pattern transfer. Directed self-assembly (DSA) of spherical block copolymers (BCPs) provides promising pattern resolution extendibility and pattern layout flexibility as long as proper pre-pattern designs are provided. Polystyrene-block-polydimethylsiloxane in the form of monolayered spheres is used as a vehicle to form either globally densely packed nanodot arrays in the data zone or locally densely packed nanodot arrays in the servo zone on a BPM template. Skew compatibility of spherical BCPs is also discussed. The BCP dot template is then applied as the scaffold for pattern transfer into quartz to make a nanoimprint mold and further into magnetic storage media. Distributions of both dot sizes and dot spacings are closely monitored after DSA pattern formation and pattern transfer. |
| File Format | PDF HTM / HTML |
| DOI | 10.1117/1.JMM.12.3.031110 |
| Volume Number | 12 |
| Alternate Webpage(s) | https://www.spiedigitallibrary.org/journals/Journal-of-MicroNanolithography-MEMS-and-MOEMS/volume-12/issue-03/031110/Directed-self-assembly-for-high-density-bit-patterned-media-fabrication/10.1117/1.JMM.12.3.031110.pdf |
| Alternate Webpage(s) | https://www.spiedigitallibrary.org/journalIssue/Download?DOI=10.1117/1.JMM.12.3.031110&downloadType=journal+article&fullDOI=10.1117/1.JMM.12.3.031110 |
| Alternate Webpage(s) | https://www.spiedigitallibrary.org/journalArticle/Download?fullDOI=10.1117/1.JMM.12.3.031110 |
| Alternate Webpage(s) | https://www.spiedigitallibrary.org/journalArticle/Download?fullDOI=10.1117/1.JMM.12.3.031110&isResultClick=False |
| Alternate Webpage(s) | https://www.spiedigitallibrary.org/journalIssue/Download?DOI=10.1117/1.JMM.12.3.031110&downloadType=journal+article&fullDOI=10.1117/1.JMM.12.3.031110&isResultClick=True |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
