NDLI: Process and Apparatus for Controlling Coating Deposition Background of the Invention

Content Provider	Semantic Scholar
Copyright Year	2017
Abstract	(57) ABSTRACT (21) Appl. No.: 13/392.237 Method and apparatus for controlling a coating deposition 1-1. process, where at least at one stage of the coating deposition (22) PCT Filed: Sep. 2, 2010 process at least one of the coating precursors includes a gas, a vapour or an aerosol. The method includes monitoring (86). PCT No.: PCT/F10/50685 ultrafine particles and adjusting at least one process param
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Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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