NDLI: Properties of ZnO films grown on (0001) sapphire substrate using H2O and N2O as O precursors by atmospheric pressure MOCVD

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Properties of ZnO films grown on (0001) sapphire substrate using H2O and N2O as O precursors by atmospheric pressure MOCVD

Content Provider	Semantic Scholar
Author	Dai, Jiangnan Su, Hongbo Wang, Li Ya Pu, Yong Fang, Wenqing Jiang, Fengyi
Copyright Year	2006
Abstract	Abstract In this paper, we compare the properties of ZnO thin films (0 0 0 1) sapphire substrate using diethylzinc (DEZn) as the Zn precursor and deionized water (H 2 O) and nitrous oxide (N 2 O) as the O precursors, respectively in the main ZnO layer growth by atmospheric pressure metal–organic chemical vapor deposition (AP-MOCVD) technique. Surface morphology studied by atomic force microscopy (AFM) showed that the N 2 O-grown ZnO film had a hexagonal columnar structure with about 8 μm grain diameter and the relatively rougher surface compared to that of H 2 O-grown ZnO film. The full-widths at half-maximum (FWHMs) of the (0 0 0 2) and ( 1 0 1 ¯ 2 ) ω -rocking curves of the N 2 O-grown ZnO film by double-crystal X-ray diffractometry (DCXRD) measurement were 260 and 350 arcsec, respectively, indicating the smaller mosaicity and lower dislocation density of the film compared to H 2 O-grown ZnO film. Compared to H 2 O-grown ZnO film, the free exciton A (FX A ) and its three phonon replicas could be clearly observed, the donor-bound exciton A 0 X ( I 10 ):3.353 eV dominated the 10 K photoluminescence (PL) spectrum of N 2 O-grown ZnO film and the hydrogen-related donor-bound exciton D 0 X ( I 4 ):3.363 eV was disappeared. The electron mobility (80 cm 2 /V s) of N 2 O-grown ZnO film has been significantly improved by room temperature Hall measurement compared to that of H 2 O-grown ZnO film.
Starting Page	426
Ending Page	430
Page Count	5
File Format	PDF HTM / HTML
DOI	10.1016/j.jcrysgro.2006.01.009
Volume Number	290
Alternate Webpage(s)	http://www.spm.com.cn/papers/1127.pdf
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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