Method of Measuring Thckness of a Multi-layers Film Field of the Invention

Content Provider	Semantic Scholar
Copyright Year	2017
Abstract	A multi-layers with (m+1) sublayers is formed on a sub strate. The purpose of the present invention is to measure the thickness of the sublayer (m+1) using the ellipsometry even the physical parameters of the other sublayers are unknow. The key of the method is to reguard the multi-layers (sublayer 1/sublayer 27 . . . /sublayer m) as a reduced layer. Then the multi-layers becomes a double layers formed on a substrate, that is a sublayer (m+1) and a reduced layer. Assume that the sublayer (m+1) is composed of material M. Then the multi-layers becomes a double M layers formed on a substrate, that is a M layer and a reduced layer. A first measurement is performed to measure the thickness (T1) of the double layers by using an ellipsometry. Next, a second measurement is done to measure the thickness (T2) of the reduced layer by using an ellipsometry. The thickness of the sublayer (m+1) can be obtained by performing (T1-T2).
File Format	PDF HTM / HTML
Alternate Webpage(s)	https://patentimages.storage.googleapis.com/a8/02/b0/b3e13811a77895/US5784167.pdf
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article