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Surface Characterization of Sputtered ZnO:Al for Silicon Thin-Film Solar Cells
| Content Provider | Semantic Scholar |
|---|---|
| Author | Hüpkes, Jürgen Siekmann, Hilde Worbs, Janine Bunte, Eerke Jost, G. |
| Copyright Year | 2010 |
| Abstract | Using a large range of differently deposited ZnO:Al substrates we investigated the correlation between the as-deposited ZnO:Al surface and the resulting surface topography of ZnO:Al after texture-etching in diluted hydrochloric acid. SEM images of the unetched surface were employed to characterize different features of the unetched topography. Based on these findings a new surface classification is suggested. SEM results show that ZnO:Al samples with similar features before etching also show strong resemblance in their surface topography after etching. Furthermore we prove that certain features of the unetched surface are optically measurable via haze measurements and can therefore be used to predict the etch results. Angular resolved scattering measurement and SEM images of the etched surface are used to evaluate the results of the etching step. Finally, μc-Si solar cells are assembled on the ZnO:Al films. We show that the short circuit current density of the test cells is correlated to the angular resolved scattering signal of discrete large angles. |
| Starting Page | 3078 |
| Ending Page | 3082 |
| Page Count | 5 |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.huepkes.de/files/jost_eupvsec_2010_zno_surface_analysis_before_and_after_etching.pdf |
| Alternate Webpage(s) | https://doi.org/10.4229/25thEUPVSEC2010-3AV.1.70 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
