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Resist Pattern-forming Method Cross-reference to Related Applications
| Content Provider | Semantic Scholar |
|---|---|
| Copyright Year | 2017 |
| Abstract | (71) Applicant: JSR Corporation, Tokyo (JP) Sep. 9, 2010 (JP) ................................. 2010-202361 Aug. 22, 2011 (JP) ................................. 2011-181004 (72) Inventors: Yusuke ANNO, Tokyo (JP): Takashi MORI, Tokyo (JP); Hirokazu Publication Classification SAKAKIBARA, Tokyo (JP); Taichi FURUKAWA, Tokyo (JP); Kazunori (51) Int. Cl. TAKANASHI, Tokyo (JP); Hiromitsu GO3F 7/16 (2006.01) TANAKA, Tokyo (JP); Shin-ya GO3F 7/30 (2006.01) MINEGISHI, Tokyo (JP) (52) U.S. Cl. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/3e/0b/39/cc2bbefb1dbedc/US20150160556A1.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |