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Precision tracking motion control of an xy micropositioning stage driven by stepper motor
| Content Provider | Semantic Scholar |
|---|---|
| Author | Tlijani, Hatem Benrejeb, Mohamed |
| Copyright Year | 2010 |
| Abstract | This paper aims to present a motion coordination control approach for two axis XY stage system driven by PM stepper motors. The proposed coordinated control approach is based on a three tier composite control structure feed-forward, feedback PID and force disturbance observer. The contouring performance of a biaxial system is studied for circular trajectories and has been improved by using the proposed control scheme.To demonstrate the effectiveness of the control system design based on analysis of stage dynamics, typical results of system performance experiments micropositionning motion with high precision tracking and accurate positioning was obtained by simulations developed using Matlab and Simulink software. |
| Starting Page | 91 |
| Ending Page | 96 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.msc-les.org/proceedings/mas/2010/MAS2010_91.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |