Attenuation of 7 GHz surface acoustic waves on silicon

Content Provider	Semantic Scholar
Author	Li, Dongyao Cahill, David G.
Copyright Year	2015
Abstract	Abstract We measured the attenuation of GHz frequency surface acoustic waves (SAWs) on the Si (001) surface using an optical pump-probe technique at temperatures between 300 and 600 K. SAWs are generated and detected by a 700 nm Al grating fabricated by nano-imprint lithography. The grating for SAW generation is separated from the grating for SAW detection by ≈ 150 μm. The amplitude of SAWs is attenuated by coupling to bulk waves created by the Al grating, diffraction due to the finite size of the source, and the intrinsic relaxational Akhiezer damping of shear elastic waves in Si. The lifetime of ∼ 7 GHz transverse acoustic phonons at room temperature is ≈ 95 ns, an order of magnitude longer than the lifetimes of GHz frequency longitudinal acoustic phonons of similar frequencies. The fQ product of a hypothetical micromechanical oscillator limited by this mechanism is ∼ 5× 1012 Hz.
File Format	PDF HTM / HTML
Alternate Webpage(s)	http://users.mrl.illinois.edu/cahill/li_si_saw_attn_submitted.pdf
Language	English
Access Restriction	Open
Subject Keyword	Acoustic cryptanalysis Aluminum Crystal oscillator GNU nano Hertz (Hz) Imprinting (Psychology) International System of Units Oscillator Device Component Phonon Phonons Silicon Surface Acoustic Wave Device Component Transverse wave
Content Type	Text
Resource Type	Article