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Proton beam writing of low-loss polymer optical waveguides
| Content Provider | Semantic Scholar |
|---|---|
| Author | Sum, Tze Chien Bettiol, Andrew Anthony Kan, Jeroen Anton Van Watt, F. Pun, Edwin Yue-Bun Tung, K. K. |
| Copyright Year | 2003 |
| Abstract | Proton beam writing is a direct-write micromachining technique capable of producing three-dimensional microstructures with straight and smooth sidewalls. Low-loss channel waveguides in SU-8, a chemically amplified negative tone resist, were fabricated using a focused submicron beam of 2.0 MeV protons with a dose of 30 nC/mm2 and a beam current of approximately 2 pA. Propagation losses of approximately (0.19±0.03) dB/cm were measured at 632.8 nm wavelength. Waveguides of arbitrary design can be easily fabricated using proton beam writing, making the technique ideal for the rapid prototyping of optical circuits. |
| Starting Page | 1707 |
| Ending Page | 1709 |
| Page Count | 3 |
| File Format | PDF HTM / HTML |
| DOI | 10.1063/1.1606502 |
| Alternate Webpage(s) | http://www.ciba.nus.edu.sg/publications/pho/pho2003_3.pdf |
| Alternate Webpage(s) | https://doi.org/10.1063/1.1606502 |
| Volume Number | 83 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
