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Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator
| Content Provider | Semantic Scholar |
|---|---|
| Author | Song-Bai, Wang Guang-Jiu, Lei Zhenhua, Bi Ghomi, Hamid Size, Yang Dong-Ping, Liu |
| Copyright Year | 2016 |
| Abstract | An experimental investigation of the saturation ion current densities (Jions) in hydrogen inductively coupled plasma (ICP) produced by a large-power (2–32 kW) radio frequency (RF) generator is reported, then some reasonable explanations are given out. With the increase of RF power, the experimental results show three stages: in the first stage (2–14 kW), the electron temperature will rise with the increase of RF power in the ICP, thus, the Jions increases continually as the electron temperature rises in the ICP. In the second stage (14–20 kW), as some H− ions lead to the mutual neutralization (MN), the slope of Jions variation firstly decreases then increases. In the third stage (20–32 kW), both the electronic detachment (ED) and the associative detachment (AD) in the ICP result in the destruction of H− ions, therefore, the increased amplitude of the Jions in the third stage is weaker than the one in the first stage. In addition, with the equivalent transformer model, we successfully explain that the Jions at different radial locations in ICP has the same rule. Finally, it is found that the Jions has nothing to do with the outer/inner puffing gas pressure ratio, which is attributed to the high-speed movement of hydrogen molecules. |
| Starting Page | 907 |
| Ending Page | 911 |
| Page Count | 5 |
| File Format | PDF HTM / HTML |
| DOI | 10.1088/1009-0630/18/9/06 |
| Alternate Webpage(s) | http://pst.hfcas.ac.cn/fileup/PDF/15-255.pdf |
| Alternate Webpage(s) | https://doi.org/10.1088/1009-0630%2F18%2F9%2F06 |
| Volume Number | 18 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
