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Integrated passives and resonant inductive coupling as a displacement sensing mechanism for large piston/rotation micromirrors
Content Provider | Semantic Scholar |
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Author | Tseng, Victor Farm-Guoo |
Copyright Year | 2015 |
Abstract | Research Project Experience: Inductive eddy current position sensing for MEMS devices Developed microfabricated coil based inductive position sensor with interface circuitry to detect large vertical displacement micromirrors. Can simultaneously sense piston position and tilt angle. Supports resonant amplitude detection and resonant frequency shift detection. Achieved piston sensing range of 1 mm (300 nm resolution) and 130 μm (20 nm resolution). |
File Format | PDF HTM / HTML |
Alternate Webpage(s) | https://www.img.ufl.edu/sites/default/files/users/profile/resume/157-Victor%20Farm-Guoo_1516916288.pdf |
Language | English |
Access Restriction | Open |
Content Type | Text |
Resource Type | Article |