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Detection and Isolation of Localised Shunts in Industrial Silicon Solar Cells Using Pl Imaging
| Content Provider | Semantic Scholar |
|---|---|
| Author | Augarten, Yael Abbott, Malcolm Trupke, Thorsten Bardos, R. A. Hartmann, Hans Gupta, Reena Bauer, Jan S. Breitenstein, Otwin |
| Copyright Year | 2007 |
| Abstract | A lithographic projection apparatus in which a reaction force is generated between a balance mass and a substrate table. The balance mass is elastically coupled to the base frame with a suspension eigenfrequency of between 0.3 and 10 Hz. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www-old.mpi-halle.mpg.de/mpi/publi/pdf/8012_07.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |