NDLI: Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope.

Content Provider	Semantic Scholar
Author	Chun, Byung Seon Kim, Kwangsoo Gweon, Daegab
Copyright Year	2009
Abstract	In this research, chromatic confocal microscopy with transverse point beam scanning is constructed for three-dimensional surface measurement without longitudinal mechanical translation. In beam scanning chromatic confocal microscopy, the wavelength-to-depth relation and the lateral field of view should be determined considering the beam scanning angle. With the experimental results from a sample structure, the three-dimensional profile is reconstructed by relating the wavelength and scanning angle to the axial and the lateral coordinates.
Starting Page	073706
Ending Page	073706
Page Count	1
File Format	PDF HTM / HTML
Alternate Webpage(s)	http://koasas.kaist.ac.kr/bitstream/10203/16506/1/000268615700020.pdf
PubMed reference number	19655955v1
Alternate Webpage(s)	https://doi.org/10.1063/1.3184023
DOI	10.1063/1.3184023
Journal	The Review of scientific instruments
Volume Number	80
Issue Number	7
Language	English
Access Restriction	Open
Subject Keyword	Microscope Device Component Microscopy, Confocal wavelength
Content Type	Text
Resource Type	Article

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Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope.