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Formation of Ni germano-silicide on single crystalline Si/sub 0.3/Ge/sub 0.7//Si
| Content Provider | Semantic Scholar |
|---|---|
| Author | Chen, W. J. Chin, A. S. Liu, Jianping |
| Copyright Year | 2002 |
| Abstract | We have studied the Ni and Co germano-silicide on Si/sub 0.3/Ge/sub 0.7//Si. The Ni germano-silicide shows a low sheet resistance of 4-6 /spl Omega///spl square/on both P/sup +/N and N/sup +/P junctions, which is much smaller than Co germano-silicide. In addition, small junction leakage currents of 3/spl times/10/sup -8/ A/cm/sup 2/ and 2/spl times/10/sup -7/ A/cm/sup 2/ are obtained for Ni germano-silicide on P/sup +/N and N/sup +/P junctions, respectively. The good germano-silicide integrity is due to the relatively uniform thickness as observed by cross-sectional TEM. |
| Starting Page | 464 |
| Ending Page | 466 |
| Page Count | 3 |
| File Format | PDF HTM / HTML |
| DOI | 10.1109/LED.2002.801288 |
| Volume Number | 23 |
| Alternate Webpage(s) | https://ir.nctu.edu.tw/bitstream/11536/28616/1/000177207300007.pdf |
| Alternate Webpage(s) | https://doi.org/10.1109/LED.2002.801288 |
| Journal | IEEE Electron Device Letters |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |