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Nano-scale testing of nanowires and carbon nanotubes using a microelectromechanical system
| Content Provider | Semantic Scholar |
|---|---|
| Author | Espinosa, Horacio D. Zhu, Yong Jun Peng, Bei Loh, Owen |
| Copyright Year | 2007 |
| Abstract | The need to characterize nanometer-scale materials and structures has grown tremendously in the past decade. These structures may behave very differently from their larger counterparts and must be carefully characterized before their full potential is realized. The challenging task of mechanical characterization requires an entirely new set of techniques to achieve the force and displacement resolution needed to accurately characterize these structures. This chapter begins with a brief review of some of the methods used in mechanical characterization of nanoscale specimens, followed by a detailed description of a MEMS-based material testing system. This MEMS-based system allows for continuous observation of specimen deformation and failure with sub-nanometer resolution by scanning or transmission electron microscope while simultaneously measuring the applied load electronically with nano-Newston resolution. Special emphasis is placed on modeling and analysis of a thermal actuator used to apply a displacement-controlled load to the tensile specimen as well as the electrostatic load sensor. Finally, experimental results demonstrating the advantages of the MEMS-based system are presented. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.mae.ncsu.edu/zhu/paper/Zhu_MEMSchapter.pdf |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Actuator Device Component Biological specimen CDISC SEND Biospecimens Terminology Cross link Differential capacitance Displacement mapping Electric Capacitance Failure cause Finite element method GNU nano Ion beam Ions Large Medication Event Monitoring System Microelectromechanical systems Microscope Device Component Nanotubes Nanotubes, Carbon Nanowires Numerous Palladium Psychologic Displacement Real-time clock Scanning Electron Microscopy Transmission Electron Microscopes voltage |
| Content Type | Text |
| Resource Type | Article |