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Thermal stress implications in athermal TiO2 waveguides on a silicon substrate.
| Content Provider | Semantic Scholar |
|---|---|
| Author | Bovington, Jock Cheng, Kwang-Ting Bowers, John E. |
| Copyright Year | 2014 |
| Abstract | Ring resonators with TiO2 core confinement factors from 0.07 to 0.42 are fabricated and measured for thermal sensitivity achieving -2.9 pm/K thermal drift in the best case. Materials used are CMOS compatible (TiO2, SiO2 and Si3N4) on a Si substrate. The under discussed role of stress in thermo-optic behavior is clearly observed when contrasting waveguides buried in SiO2 to those with etched sidewalls revealed to air. Multiphysics simulations are conducted to provide a theoretical explanation of this phenomenon in contrast to the more widely reported theories on thermo-optic behavior dominated by confinement factor. |
| File Format | PDF HTM / HTML |
| DOI | 10.1364/OE.22.000661 |
| PubMed reference number | 24515025 |
| Journal | Medline |
| Volume Number | 22 |
| Issue Number | 1 |
| Alternate Webpage(s) | http://cadlab.ece.ucsb.edu/sites/default/files/papers/OE14.pdf |
| Journal | Optics express |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |